Tuesday, 27. June 2017


KTH Research Project Database

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Microsystem Technology (MST) (»Add to Infobox)


School of Electrical Engineering
KTH - Royal Institute of Technology

Show picture in detail Osquldas väg 10
100 44 Stockholm

Fax:  +46 8 10 08 58
Internet:  http://www.ee.kth.se/mst/

The research at MST is mainly centered around Microelectromechanical Systems (MEMS and its applications, with a focus on silicon-based applied sensor and actuator technology. The main research areas are microfluidic MEMS, optical MEMS and radio frequency signal MEMS components (RF MEMS).
The Microsystem Technology lab (MST) is a part of the KTH School of Eletrical engineering. The group fabricates its silicon structures and devices at the KTH microelectronics laboratory, comprising 1200m2 of cleanroom area with all the facilities of small-scale microelectronics and for research on and development of special purpose structures and components in silicon.


PROJECTS (11/11) 

3D IC integrated MEMS

A highly integrated optical sensor for point-of-care label-free identification of pathogenic bacteria strains and their antibiotic resistance - INTOPSENS

Flow measurement in turbulent gas flows

Gas microvalves

IC-Compatible Wafer-Level Packaging

Interfacing microfluidic components

Lab-on-a-chip components

Microfluidic devices for cell analysis in 3D

Miniaturised fuel cells

Transdermal interfaces

WOV Working on Venus

ARCHIVED PROJECTS (8/8) 

Antennas with MEMS technology for mobile terminals and MIMO systems

Batch integration of high-quality materials to microsystems - Q2M

Bead-based microfluidic platform for biochemical applications

New photonic systems on a chip based on dyes for sensor applications scalable at wafer fabrication - PHODYE

RF MEMS switching circuits and applications

Ultrahigh sensitivity slot-waveguide biosensor on a highly integrated chip for simultaneous diagnosis of multiple diseases - SABIO

Wafer-level packaging of MEMS devices by full-wafer adhesive bonding

Wafer-level transfer bonding for integration of thin film materials with integrated circuits (ICs)

PEOPLE (15/15) 

Professor Göran Stemme (Research Leader / Microsystem Technology)
 
Professor Frank Niklaus (Research Leader / Microsystem Technology)
Niclas Roxhed (Research Leader / Microsystem Technology)
Professor Wouter van der Wijngaart (Research Leader / Microsystem Technology)
Assistant Professor Hans Sohlström (Research Leader / Microsystem Technology)
Joachim Oberhammer
Kristinn Gylfason
Adit Decharat
Farizah Saharil
Mikael Sterner
Fredrik Carlborg
Fredrik Forsberg
Martin Lapisa
Mikael Antelius
Andreas Fischer


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